Thermocompression bonding head fixture

A bonding head, comprising:

• a bonding head fixture having a workpiece contact surface, at least one recess in the workpiece contact surface, and heat passages leading into and out of the at least one recess;
• and
• a heat source connected to at least one of the heat passages.

A method, comprising:

• gripping a workpiece with a bonding head fixture, the bonding head fixture comprising a workpiece contact surface, at least one recess in the workpiece contact surface, and heat passages leading into and out of the at least one recess, wherein the workpiece contact surface directly contacts the workpiece;
• and
• heating the workpiece by direct heating at the workpiece contact surface, and by providing a heated fluid to the at least one recess via the heat passages.