Back to results
US 2026/0101666 A1Published application
Deposition mask, method of manufacturing the deposition mask, and electronic device manufactured by using the deposition mask
AssigneeSamsung Display Co., Ltd.
InventorsYoung Jin SONG, Jeong Kuk KIM, Seung Sok SON
Life of this patent
Estimating the term…
Abstract
A deposition mask includes a mask frame having a cell opening, an intermediate inorganic film disposed on the mask frame, and a membrane disposed on the intermediate inorganic film and having a plurality of pixel openings communicating with the cell opening. The intermediate inorganic film is formed of a material including germanium.
Claims20
A deposition mask comprising:
- a mask frame having a cell opening;
- an intermediate inorganic film disposed on the mask frame;
- and
- a membrane disposed on the intermediate inorganic film and having a plurality of pixel openings which communicate with the cell opening,
- wherein the intermediate inorganic film is formed of a material comprising germanium.
2 more elements
A method of manufacturing a deposition mask, comprising:
- forming an intermediate inorganic film on a mask substrate;
- forming, on the intermediate inorganic film, a membrane having a plurality of pixel openings;
- patterning the mask substrate, wherein patterning the mask substrate forms a cell opening partially exposing the intermediate inorganic film;
- and
- removing a portion of the intermediate inorganic film exposed by the cell opening such that the cell opening communicates with the plurality of pixel openings,
- wherein the intermediate inorganic film is formed of a material comprising germanium.
3 more elements
An electronic device comprising a display panel,
- wherein the display panel comprises:
- a substrate;
- and
- light emitting layers formed on the substrate using a deposition mask, and
- the deposition mask comprises:
- a mask frame having a cell opening;
- an intermediate inorganic film disposed on the mask frame;
- and
- a membrane disposed on the intermediate inorganic film and having a plurality of pixel openings which communicate with the cell opening,
- wherein the intermediate inorganic film is formed of a material comprising germanium.
7 more elements
Dependencies are inferred from the claim text.