Grounded Slit Door for Substrate Process Chamber

Abstract

Embodiments of slit door assemblies for use in a process chamber are provided herein. In some embodiments, a slit door assembly comprises: a slit door having an arcuate profile and a first surface comprising a plasma facing surface and a second surface opposite the first surface, and wherein at least one of: the first surface or the second surface includes a recessed portion along a peripheral edge thereof; or the slit door has an annular shape; and an actuator assembly coupled to the slit door and configured to move the slit door in a vertical direction, wherein the actuator assembly includes a plurality of rods coupled to the slit door, wherein one or more of the plurality of rods include a cooling channel extending to the slit door or a heater.

Dependencies are inferred from the claim text.