High power and large area uniform microwave plasma source
AssigneeApplied Materials, Inc.
InventorXIAOKANG YANG
Life of this patent
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Abstract
Embodiments described herein relate to an apparatus that includes a microwave power generator, and a rectangular waveguide coupled to the microwave power generator. In an embodiment, the apparatus may also include an impedance tuner that is coupled to the rectangular waveguide, and a coaxial waveguide that is coupled to the rectangular waveguide. In an embodiment, the coaxial waveguide includes a conductive pin with a first end and a second end. In an embodiment, the apparatus further includes a circular waveguide cavity around the second end of the conductive pin, and a slotted antenna in the circular waveguide cavity.
Claims20
An apparatus, comprising:
- a microwave power generator;
- a rectangular waveguide coupled to the microwave power generator;
- an impedance tuner coupled to the rectangular waveguide;
- a coaxial waveguide coupled to the rectangular waveguide, wherein the coaxial waveguide comprises a conductive pin with a first end and a second end;
- a circular waveguide cavity around the second end of the conductive pin;
- and
- a slotted antenna in the circular waveguide cavity.
An apparatus, comprising:
- a microwave plasma source, comprising:
- a microwave power generator;
- a rectangular waveguide coupled to the microwave power generator;
- an impedance tuner coupled to the rectangular waveguide;
- a coaxial waveguide coupled to the impedance tuner;
- a circular waveguide cavity coupled to the coaxial waveguide;
- and
- a slot antenna within the circular waveguide cavity;
- and
- a plasma chamber coupled to the microwave plasma source, wherein the plasma chamber comprises:
- a chamber housing;
- and
- a dielectric plate to seal an opening of the chamber housing,
- wherein the slot antenna is on a surface of the dielectric plate outside of the chamber housing.
An apparatus, comprising:
- a microwave plasma source that comprises:
- a microwave power generator;
- a microwave power transmission path that comprises a first region configured to propagate TE mode microwave power, a second region configured to propagate TEM mode microwave power, and a third region configured to propagate TM mode microwave power;
- and
- a slotted antenna coupled to the third region of the microwave power transmission path;
- and
- a chamber coupled to the microwave plasma source, wherein the chamber comprises:
- a chamber housing;
- and
- a dielectric plate to seal an opening of the chamber housing, wherein the slotted antenna is on the dielectric plate outside of the chamber housing.
Dependencies are inferred from the claim text.