Back to results
US 2026/0100333 A1Published application
Microwave plasma source with non-cylindrical cavity antennas
AssigneeApplied Materials, Inc.
InventorsSATHYA SWAROOP GANTA, KALLOL BERA, JOSEPH AUBUCHON
Life of this patent
Estimating the term…
Abstract
Embodiments described herein relate to an apparatus that includes a plate, where the plate includes a first dielectric material, and a resonator coupled to the plate. In an embodiment, the resonator includes a second dielectric material, and the resonator has a cross-sectional shape with a first end with a first width and a second end with a second width that is smaller than the first width. In an embodiment, the first end faces the plate.
Claims20
An apparatus, comprising:
- a plate, wherein the plate comprises a first dielectric material;
- and
- a resonator coupled to the plate, wherein the resonator comprises a second dielectric material, wherein the resonator has a cross-sectional shape with a first end with a first width and a second end with a second width that is smaller than the first width, and wherein the first end faces the plate.
An apparatus, comprising:
- a plate, wherein the plate comprises a first dielectric material;
- and
- a resonator coupled to the plate, wherein the resonator comprises a second dielectric material, and wherein the resonator comprises:
- a first circular portion;
- and
- a second circular portion that intersects the first circular portion.
3 more elements
An apparatus, comprising:
- a plate, wherein the plate comprises a first dielectric material;
- and
- a resonator coupled to the plate, wherein the resonator comprises a second dielectric material, and wherein the resonator comprises:
- a first layer on the plate, wherein the first layer comprises:
- a first dielectric cavity;
- and
- a second dielectric cavity adjacent to the second dielectric cavity;
- and
- a second layer on the first layer, wherein the second layer comprises a third dielectric cavity that overlaps at least a portion of the first dielectric cavity and at least a portion of the second dielectric cavity.
6 more elements
Dependencies are inferred from the claim text.