Generation method and generation device of integrated circuit model data set

A generation device of an integrated circuit model data set, comprising:

• at least one processor and a memory, wherein the at least one processor is configured to access the memory and execute processes of:
• obtaining a plurality of reference model data sets that correspond to different parameter combinations;
• analyzing the plurality of reference model data sets to generate a reference data trend, and determining a key region according to a target parameter value of a target parameter;
• obtaining a plurality of filtered model data sets after the plurality of reference model data sets are filtered according to the reference data trend and the key region;
• and
• inputting the plurality of filtered model data sets into a recursive machine learning model, wherein the recursive machine learning model is configured to sequentially execute an interpolation procedure and an extrapolation procedure, so as to generate a target model data set;
• wherein, in the interpolation procedure, the recursive machine learning model generates an interpolation model data set according to the plurality of filtered model data sets;
• wherein, in the extrapolation procedure, the recursive machine learning model generates an extrapolation model data set that corresponds to the target parameter value according to the plurality of filtered model data sets and the interpolation model data set, and the extrapolation model data set is configured as the target model data set.