Semiconductor manufacturing device, semiconductor manufacturing plant, and semiconductor manufacturing method

A semiconductor manufacturing method that uses a semiconductor manufacturing device provided with a plurality of processors and a number of loader-unloaders exceeding thereof, for an object to be treated that is transported according to a production plan determined as desired, carries, by the processor for treating, the object to be treated which is determined for each manufacturing lot into the loader-unloader in a unit of the manufacturing lot, thereafter transports, to the processor, and treats each object to be treated in a single unit, and then transports each object to be treated to the loader-unloader, the method comprising:

• starting the treatment by each processor after the manufacturing lot of the object to be treated by each processor is carried into each loader-unloader while the remaining loader-unloader is left empty;
• predicting the processor that finishes treatment relatively early, while the object to be treated is being treated by each processor, based on the manufacturing information of the object to be treated for each processor;
• and
• carrying, before finishing treatment by each processor, the manufacturing lot to be treated by the processor that has been predicted to finish treatment relatively early into the loader-unloader that is currently empty regardless of the order of the production plan.