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US 2026/0099100 A1Published application
Optical subassembly
OwnerRalf AMELINGinventor
Life of this patent
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Abstract
An optical assembly for an illumination optics unit or a projection optics unit of a projection exposure apparatus comprises at least one optical component, a load-bearing structure, and a bearing device. The at least one optical component is mounted on the load-bearing structure via the bearing device. The bearing device comprises one or more active elements for the at least partial compensation of deformations of the load-bearing structure.
Claims20
An optical assembly, comprising:
- an optical component;
- a load-bearing structure;
- and
- a bearing device mounting the optical component on the load-bearing device,
- wherein the bearing device comprises an active element configured to at least partially compensate deformations of the load-bearing structure.
2 more elements
Dependencies are inferred from the claim text.