Probe for probe card
AssigneeJapan Electronic Materials Corporation
InventorHideki MUKAI
Life of this patent
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Abstract
This probe for a probe card has, on a reference surface perpendicular to a buckling direction a plurality of deformed regions which are arranged with spacings therebetween, the outer edge of which is circular, oval, or polygonal, and which has a recessed shape or a protruding shape, and a framework region, which is provided at the boundary of adjacent deformed regions. A plurality of the deformed regions are arranged with spacings therebetween in rows in a prescribed direction relative to the lengthwise direction of the probe, and a plurality of the rows are arranged with spacings therebetween in the lengthwise direction of the probe.
Claims10
A probe for a probe card, wherein the probe is a vertical probe that buckles in a direction perpendicular to the longitudinal direction of a conductive metal plate, comprising:
- a plurality of deformed regions arranged with spacings therebetween on the reference surface included in the plate surface perpendicular to a buckling direction, the outer edge of each deformed region being circular, ellipse, or polygonal, and the deformed region having a recessed shape or a protruding shape;
- and
- a framework region provided at the boundary of adjacent deformed regions, wherein
- a plurality of the deformed regions are arranged as a row with spacings therebetween in a predetermined direction relative to the lengthwise direction of the probe, and
- a plurality of the rows are arranged with spacings there between, wherein
- the plurality of deformed regions in the N-th row and the plurality of deformed regions in the (N+1)-th row are staggered along the predetermined direction.
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Dependencies are inferred from the claim text.