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US 2026/0098875 A1Published application
Cantilever-type probe for probe card, and probe card
AssigneeJapan Electronic Materials Corporation
InventorShohei TAJIMA
Life of this patent
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Abstract
A cantilever-type probe for a probe card includes: a base part that extends upward from a terminal part connected to a wiring board; a needle tip part; and a beam part positioned between the base part and the needle tip part. The base part includes multiple three-dimensional stress distribution sections, such as recesses or protrusions, arranged along the longitudinal direction of the terminal part.
Claims10
A cantilever-type probe for a probe card, comprising:
- a base part that extends upward from a terminal part connected to a wiring board;
- a needle tip part;
- and
- a beam part positioned between the base part and the needle tip part, wherein the base part includes a plurality of three-dimensional stress distribution sections, which are non-through recesses in the base part in the thickness direction of the base part or protrusions, arranged along the longitudinal direction of the terminal part, and spaced apart from an end face on the wiring board side.
1 more element
A probe card, comprising:
- a cantilever-type probe for a probe card, which includes a base part that extends upward from a terminal part connected to a wiring board, a needle tip part, and a beam part positioned between the base part and the needle tip part;
- and
- a wiring board, wherein
- the base part includes a plurality of three-dimensional stress distribution sections, which are non-through recesses in the base part in the thickness direction of the base part, arranged along the longitudinal direction of the terminal part, and spaced apart from an end face on the wiring board side,
- in a solder layer that fixes the probe to a land of the wiring board, solder parts formed in the recesses are fixed to an end-face joint section formed between the land and the terminal part, by the solder layer covering side surfaces of the base part in a cantilever-like structure.
2 more elements
Dependencies are inferred from the claim text.