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US 2026/0098845 A1Published application
Gas sensor with a sensor element and a flame arrester and use of the same for the detection of gases
AssigneeInfineon Technologies AG
InventorsRainer Markus SCHALLER, Matthias EBERL, Christoph STEINER
Life of this patent
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Abstract
A gas sensor includes a sensor element for the detection of a gas, an encapsulation, which surrounds the sensor element and has an opening for a gas to be detected to pass through to the sensor element, and a flame arrester, which is arranged in the opening of the encapsulation.
Claims18
A gas sensor, comprising
- a sensor element for detection of a gas, the sensor element comprising a first surface, a second surface situated opposite to the first surface, and a deflectable membrane arranged at the first surface;
- an encapsulation, which surrounds the sensor element and has an opening for the gas to be detected to pass through to the sensor element;
- a first substrate coupled to the second surface of the sensor element, wherein the first substrate defines an open cavity that is coupled to the deflectable membrane for exposing the deflectable membrane to the gas, and wherein the first substrate has first through-openings for enabling the gas to pass from the open cavity to the deflectable membrane;
- a second substrate coupled to the first surface of the sensor element to define a closed cavity that is coupled to the deflectable membrane;
- and
- a flame arrester arranged in the opening of the encapsulation,
- wherein the flame arrester includes a leadframe that is embedded in the encapsulation,
- wherein the leadframe is coupled to the first substrate, extends at least partially across the opening of the encapsulation and has, in a region of the opening, second through-openings by which the flame arrester is at least partially formed, and
- wherein the first through-openings and the second through-openings are fluidly coupled for enabling the gas to pass from the opening, through the open cavity, to the deflectable membrane.
6 more elements
A gas sensor, comprising
- a sensor element for detection of a gas, the sensor element comprising a first surface, a second surface situated opposite to the first surface, and a deflectable membrane arranged at the first surface;
- an encapsulation, which surrounds the sensor element and has an opening for the gas to be detected to pass through to the sensor element;
- a first substrate coupled to the second surface of the sensor element, wherein the first substrate defines an open cavity that is coupled to the deflectable membrane for exposing the deflectable membrane to the gas, and wherein the first substrate has first through-openings for enabling the gas to pass from the open cavity to the deflectable membrane;
- a second substrate coupled to the first surface of the sensor element to define a closed cavity that is coupled to the deflectable membrane;
- and
- a flame arrester arranged in the opening of the encapsulation,
- wherein the flame arrester includes a network of metallic wires that extends at least partly over the opening of the encapsulation and over the open cavity,
- wherein the network of metallic wires define second through-openings by which the flame arrester is at least partially formed, and
- wherein the first through-openings and the second through-openings are fluidly coupled for enabling the gas to pass from the opening, through the open cavity, to the deflectable membrane.
6 more elements
A gas sensor, comprising
- a sensor element for detection of a gas, the sensor element comprising a first surface, a second surface situated opposite to the first surface, and a deflectable membrane arranged at the first surface;
- an encapsulation, which surrounds the sensor element and has an opening for the gas to be detected to pass through to the sensor element;
- a first substrate coupled to the second surface of the sensor element, wherein the first substrate defines an open cavity that is coupled to the deflectable membrane for exposing the deflectable membrane to the gas, and wherein the first substrate has first through-openings for enabling the gas to pass from the open cavity to the deflectable membrane;
- a second substrate coupled to the first surface of the sensor element to define a closed cavity that is coupled to the deflectable membrane;
- and
- a flame arrester arranged in the opening of the encapsulation,
- wherein the flame arrester includes a metallic cover that is embedded in the encapsulation or secured by the encapsulation,
- wherein the metallic cover extends at least partly over the opening of the encapsulation and over the first substrate, and
- wherein the metallic cover has, in a region of the opening of the encapsulation, second through-openings by which the flame arrester is at least partially formed, the second through-openings being fluidly coupled to the first through-openings for enabling the gas to pass from the opening, through the open cavity, to the deflectable membrane.
6 more elements
Dependencies are inferred from the claim text.