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US 2026/0098336 A1Published application
Metal carbide films and related devices and related methods
AssigneeEntegris, Inc.
InventorsRobert L. Wright, JR., Bryan C. Hendrix
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Abstract
Metal carbide films and related devices and related methods are provided herein. A device comprises a substrate and a metal carbide film located on the substrate. The metal carbide film comprises at least one of a molybdenum, a tungsten, or any combination thereof. The metal carbide film comprises a residual chlorine component. The metal carbide film has a carbon content of at least 10% based on a total composition of the metal carbide film.
Claims20
A device comprising:
- a substrate;
- and
- a metal carbide film located on the substrate,
- wherein the metal carbide film comprises:
- at least one of a molybdenum, a tungsten, or any combination thereof;
- and
- a residual chlorine component,
- wherein the metal carbide film has a carbon content of at least 10% based on a total composition of the metal carbide film.
5 more elements
A method comprising:
- obtaining a carbon source;
- obtaining a metal chloride precursor,
- heating the metal chloride precursor and the carbon source to form a vapor;
- and
- contacting a substrate with the vapor to form a metal carbide film,
- wherein the metal carbide film comprises a residual chlorine component,
- wherein the metal carbide film has a carbon content of at least 10% based on a total composition of the metal carbide film.
4 more elements
A method comprising:
- obtaining a substrate;
- forming a metal carbide film on the substrate,
- wherein the metal carbide film comprises:
- at least one of a molybdenum, a tungsten, or any combination thereof;
- and
- a residual chlorine component,
- wherein the metal carbide film has a carbon content of at least 10% based on a total composition of the metal carbide film;
- obtaining a metal precursor;
- heating the metal precursor to form a vapor;
- and
- contacting the vapor with the metal carbide film to form a metal layer.
8 more elements
Dependencies are inferred from the claim text.