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US 2026/0098159 A1Published application
Antireflection coatings, methods of making, and methods of use
OwnerFan Gao, Peng Jiang +1inventors
InventorsFan Gao, Peng Jiang, Jiachen Wu
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Abstract
The present disclosure provides for methods of making a substrate having an antireflective coating, substrates having an antireflective coating, and the like. The present disclosure includes methods of increasing durability of the antireflective coating by heat-annealing a coated substrate such that nanoparticles in the coating reach a glass-transition temperature as well as substrates having an antireflective coating made using these methods.
Claims20
A method of making a substrate having an antireflective coating, comprising:
- heat-annealing a coated substrate, wherein the coated substrate has a first side and a second side opposite the first side, wherein prior to heat-annealing the coated substrate includes a first monolayer of self-assembled silica nanoparticles disposed directly onto the first side of a substrate, wherein heat-annealing causes the first monolayer of nanoparticles to reach a glass-transition temperature;
- and
- forming a substrate with a first antireflective coating.
A structure comprising:
- a substrate with a first antireflective coating, wherein the substrate with the first antireflective coating has a specular reflectance of about 1% to 2.5%, and wherein the first antireflective coating is formed from a first self-assembled silica nanoparticle monolayer on a first side of the substate, and wherein the first self-assembled silica nanoparticle monolayer has been heat-treated such that nanoparticles in the first self-assembled silica nanoparticle monolayer have reached at least the glass-transition temperature.
Dependencies are inferred from the claim text.