Device for determining the focal position of a processing laser beam

Abstract

A device for determining a focal position of a processing laser beam in relation to a surface of a workpiece, including a measurement light source to emit measurement light at at least two different measurement wavelengths, a processing head to focus the measurement light onto the workpiece, and a beam guide to guide the measurement light to the processing head. The device includes at least one optical element with chromatic aberration, which is passed through by the measurement light and arranged in the processing head and a detector configured to capture an intensity of the measurement light reflected by the surface. The device includes an evaluator configured to determine the focal position of the processing laser beam in relation to the surface using the intensity captured by the detector. The beam guide is configured for jointly beam-guiding the processing laser beam and the measurement light to the processing head.

Dependencies are inferred from the claim text.