Semiconductor structure with via extending across adjacent conductive lines
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsShu-Wei Chung, Yen-Sen Wang
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AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsShu-Wei Chung, Yen-Sen Wang
Estimating the term…
A semiconductor structure and method of forming the same are provided. The semiconductor structure has a conductive structure. The semiconductor structure includes a first conductive line, a second conductive line, a third conductive line and a conductive via. The first conductive line and the second conductive line are located in a first dielectric layer and extend along a first direction. The first conductive line and the second conductive line are spaced from each other by the first dielectric layer therebetween. The third conductive line is located in a second dielectric layer and extends along a second direction. The conductive via is vertically between the first conductive line and the third conductive line, and between the second conductive line and the third conductive line. The conductive via, in a vertical direction, is overlapped with a portion of the first dielectric layer that is laterally between the first conductive line and the second conductive line.
A semiconductor structure having a conductive structure, comprising:
A semiconductor structure, comprising:
A semiconductor structure having a conductive structure, comprising:
Dependencies are inferred from the claim text.