Modular multi-directional gas mixing block

A modular gas delivery assembly, comprising:

• an inlet block defining a first fluid inlet and a first fluid outlet, wherein an inlet flow path is fluidly coupled with the first fluid inlet and the first fluid outlet;
• a modular gas block comprising:
• a block body having an inlet end and an outlet end, the block body defining a portion of a first fluid channel extending along a length of the block body and defines a second fluid channel extending along a width of the block body, wherein:
• the inlet end of the block body defines a second fluid inlet that is interfaced with the first fluid outlet and is fluidly coupled with the first fluid channel;
• the outlet end of the block body defines a second fluid outlet that is fluidly coupled with the first fluid channel;
• an upper surface of the block body defines a first fluid port that is fluidly coupled with the second fluid inlet via the first fluid channel;
• the upper surface of the block body defines a second fluid port that is fluidly coupled with the second fluid channel;
• and
• the block body defines a third fluid port that is fluidly coupled with the second fluid port via the second fluid channel;
• and
• an X-direction block that defines a third fluid inlet and a third fluid outlet, wherein the third fluid inlet is fluidly coupled with the second fluid outlet.

A modular gas delivery assembly, comprising:

• a plurality of gas sticks, wherein each gas stick comprises:
• an inlet block defining a first fluid inlet and a first fluid outlet, wherein an inlet flow path is fluidly coupled with the first fluid inlet and the first fluid outlet;
• a modular gas block comprising:
• a block body having an inlet end and an outlet end, the block body defining a portion of a first fluid channel extending along a length of the block body and defines a second fluid channel extending along a width of the block body, wherein:
• the inlet end of the block body defines a second fluid inlet that is interfaced with the first fluid outlet and is fluidly coupled with the first fluid channel;
• the outlet end of the block body defines a second fluid outlet that is fluidly coupled with the first fluid channel;
• an upper surface of the block body defines a first fluid port that is fluidly coupled with the second fluid inlet via the first fluid channel;
• the upper surface of the block body defines a second fluid port that is fluidly coupled with the second fluid channel;
• the block body defines a third fluid port that is fluidly coupled with the second fluid port via the second fluid channel;
• and
• the block body defines a fourth fluid port that is fluidly coupled with the second fluid port and the third fluid port via the second fluid channel;
• and
• an X-direction block that defines a third fluid inlet and a third fluid outlet, wherein:
• the third fluid inlet is fluidly coupled with the second fluid outlet;
• and
• the second fluid channel of at least two adjacent gas sticks are fluidly coupled with one another by interfacing the third fluid port of a first modular gas block with the fourth fluid port of a second modular gas block.