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US 2026/0096353 A1Published application
Josephson junction element and method for manufacturing josephson junction element
AssigneeFujitsu Limited
InventorKenjiro HAYASHI
Life of this patent
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Abstract
A first wiring made of a superconductor and a first electrode made of a superconductor connected to the first wiring are formed on a substrate. A resist mask that covers at least the first wiring is formed. A surface of the first electrode using the resist mask is etched. An insulator film on the surface of the first electrode using the resist mask is formed. A second electrode made of a superconductor on the surface of the insulator film using the resist mask is formed.
Claims15
A method for manufacturing a Josephson junction element, the method including:
- forming a first wiring made of a superconductor and a first electrode made of a superconductor connected to the first wiring on a substrate;
- forming a resist mask that covers at least the first wiring;
- etching a surface of the first electrode using the resist mask;
- forming an insulator film on the surface of the first electrode using the resist mask;
- and
- forming a second electrode made of a superconductor on the surface of the insulator film using the resist mask.
3 more elements
A Josephson junction element including:
- a first electrode provided on a substrate and having a thickness continuously changing from one end to the other end;
- an insulator film provided on a surface of the first electrode;
- a second electrode provided on a surface of the insulator film;
- and
- a second wiring provided on the substrate and connected to the second electrode on a side of an end portion having a relatively small thickness of the first electrode.
2 more elements
Dependencies are inferred from the claim text.