Vertical iii-v hall sensor
AssigneeTDK-Micronas GmbH
InventorsMartin CORNILS, Maria-Cristina VECCHI, Holger EGGERS, Dag BEHAMMER
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AssigneeTDK-Micronas GmbH
InventorsMartin CORNILS, Maria-Cristina VECCHI, Holger EGGERS, Dag BEHAMMER
Estimating the term…
A vertical III-V Hall sensor, which has a substrate layer with an upper side and an underside, and a first insulating layer formed on the substrate layer, and a III-V semiconductor layer formed on the insulating layer, and a second insulating layer formed on the III-V semiconductor layer, the second insulating layer being structured and having at least three openings designed as contact regions, and the III-V semiconductor layer having a length formed in the X direction and a width formed in the Y direction, and the at least three contact regions being arranged along a straight line, and the III-V semiconductor layer having an n doping, and the III-V semiconductor layer having a peripheral insulation.
A vertical III-V Hall sensor comprising:
Dependencies are inferred from the claim text.