Piezoelectric element and liquid ejection head
AssigneeSeiko Epson Corporation
InventorsNobuo OZAWA, Takatoshi YAMAZAKI, Toshihiro SHIMIZU, Shunsuke YOSHIDA
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AssigneeSeiko Epson Corporation
InventorsNobuo OZAWA, Takatoshi YAMAZAKI, Toshihiro SHIMIZU, Shunsuke YOSHIDA
Estimating the term…
In a piezoelectric element in which a lower electrode, a piezoelectric layer formed of a perovskite-type complex oxide, and an upper electrode are laminated in a laminating direction, the upper electrode has a first hydrogen absorbing layer that absorbs hydrogen. The upper electrode of the piezoelectric element preferably has a second hydrogen absorbing layer different from the first hydrogen absorbing layer. In the piezoelectric element, the film thickness of the first hydrogen absorbing layer is preferably thicker than the film thickness of the second hydrogen absorbing layer in the laminating direction.
A piezoelectric element comprising:
Dependencies are inferred from the claim text.