Piezoelectric device with hydrogen getter
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsChih-Ming Chen, Chung-Yi Yu
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Abstract
The present disclosure, in some embodiments, relates to a device structure. The device includes a substrate. A piezoelectric device is disposed over the substrate. The piezoelectric device includes a plurality of layers including a first conductor, a second conductor, a piezoelectric material between the first conductor and the second conductor, and a getter material. The plurality of layers respectively have different widths that monotonically decrease away from the substrate to give the piezoelectric device a pyramidal structure in a cross-sectional view.
Claims20
A device structure, comprising:
- a substrate;
- a piezoelectric device disposed over the substrate, wherein the piezoelectric device comprises a plurality of layers including a first conductor, a second conductor, a piezoelectric material between the first conductor and the second conductor, and a getter material;
- and
- wherein the plurality of layers respectively have different widths that monotonically decrease away from the substrate to give the piezoelectric device a pyramidal structure in a cross-sectional view.
A device structure, comprising:
- a first plate over a substrate;
- a second plate over the substrate;
- a piezoelectric material between the first plate and the second plate;
- and
- a getter material disposed on the second plate, wherein the getter material comprises one or more vertically extending segments and one or more horizontally extending segments respectively protruding outward from a sidewall of the one or more vertically extending segments.
A device structure, comprising:
- a first electrode over a substrate;
- a second electrode over the substrate;
- a piezoelectric layer between the first electrode and the second electrode;
- a passivation layer over the first electrode and the second electrode, wherein the passivation layer extends along a sidewall and over an upper surface of the piezoelectric layer;
- a first layer of getter material disposed on the first electrode;
- and
- a second layer of getter material disposed on the second electrode, wherein the passivation layer vertically separates an upper surface of the first layer of getter material from a lower surface of the second layer of getter material.
Dependencies are inferred from the claim text.