Acoustic wave device and acoustic wave filter device
AssigneeMurata Manufacturing Co., Ltd.
InventorsYuta ISHII, Katsuya DAIMON, Akihiro IYAMA
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AssigneeMurata Manufacturing Co., Ltd.
InventorsYuta ISHII, Katsuya DAIMON, Akihiro IYAMA
Estimating the term…
An acoustic wave device includes a piezoelectric layer including first and second main surfaces facing in a first direction, an IDT electrode on at least one of the first or second main surface and including electrode fingers arranged in an arrangement direction, a support facing the second main surface and including an acoustic reflection portion, and a protective film on at least one of the first or second main surface. In a region that overlaps, in plan view in the first direction, a first of the electrode fingers outermost in the arrangement direction, the protective film includes a surface of a first step where a side surface of the protective film is exposed in a direction intersecting an extending direction of the first electrode finger. When d is a thickness of the piezoelectric layer and p is a center-to-center distance between adjacent electrode fingers, d/p is about 0.5 or less.
An acoustic wave device comprising:
Dependencies are inferred from the claim text.