Method and system for identifying diffraction spots in an electron diffraction pattern

Abstract

A method for detecting diffraction spots in an electron diffraction pattern obtained from a sample, the method comprising the steps: obtaining a first image of the sample, the first image comprising the electron diffraction pattern; obtaining a second image representing a background signal intensity distribution of the first image; defining, for the second image, a plurality of second pixel sets by assigning one or more pixels of the second image to a respective second pixel set based on a pixel value of the pixel, wherein each second pixel set spans a respective pixel value range; and identifying, using first pixel sets in the first image corresponding to respective second pixel sets, any outlier pixels in the first image as being pixels associated with diffraction spots.

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