Meta-optical device and electronic device including the same
AssigneeSamsung Electronics Co., Ltd.
InventorsHyunsung PARK, Seunghoon HAN, Hyeonsoo PARK
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AssigneeSamsung Electronics Co., Ltd.
InventorsHyunsung PARK, Seunghoon HAN, Hyeonsoo PARK
Estimating the term…
Provided is a meta-optical device including a substrate, a first meta-structure layer provided on the substrate, the first meta-structure layer including a first nanostructure having a sub-wavelength shape dimension and a first peripheral material provided adjacent to the first nanostructure, a second meta-structure layer provided on the first meta-structure layer, the second meta-structure layer including a second nanostructure having the sub-wavelength shape dimension and a second peripheral material provided adjacent to the second nanostructure, and a first functional layer provided between the first meta-structure layer and the second meta-structure layer, the first functional layer including a first-first layer having an etch rate that is lower than an etch rate of the second peripheral material, and a first-second layer having a refractive index that is different from a refractive index of the first-first layer.
A meta-optical device comprising:
An electronic device comprising:
Dependencies are inferred from the claim text.