Magnetic sensor and magnetic field identification method

A magnetic sensor to identify three components of X, Y, and Z of an incident magnetic field in a three-dimensional Cartesian coordinate system, comprising:

• four magnetoelectric conversion elements formed on a silicon substrate;
• and
• a magnetic flux concentrator arranged to overlap with the four magnetoelectric conversion elements, wherein
• at least one of the four magnetoelectric conversion elements has an electrode pair arranged along a first axis obtained by rotating an X-axis or a Y-axis by 45 degrees,
• in an X-Y plane, an area of a portion of the magnetic flux concentrator which overlaps with the four magnetoelectric conversion elements is larger than an area of a portion of the magnetic flux concentrator which does not overlap with the four magnetoelectric conversion elements, and
• when a signal detected based on an X-component of the incident magnetic field is defined as Hx, a signal detected based on a Y-component is defined as Hy, and a signal detected based on a Z-component is defined as Hz, the four magnetoelectric conversion elements are arranged to detect Hx + Hy + Hz = A, - Hx + Hy + Hz = B, Hx - Hy + Hz = C, and - Hx - Hy + Hz = D.

A magnetic field identification method to identify three components of X, Y, and Z of an incident magnetic field in a three-dimensional Cartesian coordinate system using four magnetoelectric conversion elements, wherein

• at least one of the four magnetoelectric conversion elements has an electrode pair arranged along a first axis obtained by rotating an X-axis or a Y-axis by 45 degrees,
• a magnetic flux concentrator is arranged to overlap with the four magnetoelectric conversion elements, and
• in an X-Y plane, an area of a portion of the magnetic flux concentrator which overlaps with the four magnetoelectric conversion elements is larger than an area of a portion of the magnetic flux concentrator which does not overlap with the four magnetoelectric conversion elements, the method comprising:
• when a signal detected based on an X-component of the incident magnetic field is defined as Hx, a signal detected based on a Y-component is defined as Hy, and a signal detected based on a Z-component is defined as Hz, acquiring values of four magnetic fields of Hx + Hy + Hz = A, - Hx + Hy + Hz = B, Hx - Hy + Hz = C, and - Hx - Hy + Hz = D detected by the four magnetoelectric conversion elements;
• and
• based on the values of the four magnetic fields, identifying the Hx by Hx = {(A + C) - (B + D)}/4, identifying the Hy by Hy = {(A + B) - (C + D)}/4, and identifying the Hz by Hz = (A + B + C + D)/4.