Prober, method for controlling prober, inspection system, and method for controlling inspection system
AssigneeTokyo Electron Limited
InventorsShingo MORITA, Yoshinori FUJISAWA, Yoichi SHIMIZU
Life of this patent
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Abstract
A prober includes a support configured to support an inspection target; a driver configured to move the support and adjust a posture of the support; and a controller including a memory and a processor coupled to the memory. The processor is configured to perform controlling the driver to position the inspection target at a predetermined position, and inspecting the inspection target in accordance with a measurement result of characteristics of the inspection target.
Claims8
A prober, comprising:
- a support configured to support an inspection target;
- a driver configured to move the support and adjust a posture of the support;
- and
- a controller including a memory and a processor coupled to the memory, wherein
- the processor is configured to perform
- (a) controlling the driver to position the inspection target at a predetermined position, and
- (b) inspecting the inspection target in accordance with a measurement result of characteristics of the inspection target.
A method for controlling a prober including a support configured to support an inspection target, a driver configured to move the support and adjust a posture of the support, and a controller including a memory and a processor coupled to the memory, the method comprising:
- controlling, by the processor, the driver to position the inspection target at a predetermined position;
- and
- inspecting, by the processor, the inspection target in accordance with a measurement result of characteristics of the inspection target.
An inspection system, comprising:
- a prober;
- and
- a meter configured to measure characteristics of an inspection target, wherein
- the prober includes
- a support configured to support an inspection target,
- a driver configured to move the support and adjust a posture of the support, and
- a controller including a memory and a processor coupled to the memory, and
- the processor is configured to perform
- (a) controlling the driver to position the inspection target at a predetermined position, and
- (b) inspecting the inspection target in accordance with a measurement result of characteristics of the inspection target.
Dependencies are inferred from the claim text.