Gas detection chip and manufacturing method thereof

Abstract

A technology using laser thin-film electrode structure processes in a gas detection chip is provided. Different from traditional chemical etching or long pulse laser processing methods, a manufacturing method of the gas detection chip uses an ultrafast laser process to manufacture thin-film composite structures in gas detection development, and employs a multi-scale composite structure made of flexible materials (e.g., polyimide substrates) for gas detection. The gas detection chip prepared by the manufacturing method meets the demand for portable micro gas detection.

Dependencies are inferred from the claim text.