Top plate for inspection system

Abstract

A top plate design is described that allows a quick change of the reflector plates, for example, in the top plate assembly. Using various techniques, the reflector plates or, in some examples, sources of illumination, are held in place by a vacuum during operation. This technique holds the reflector plates securely without top-side fixturing, maximizing the available active area of a substrate. A vacuum secures the panel or wafer without contacting the active areas, allowing for non-contact inspection and metrology. The top plate also facilitates the use of interchangeable reflector plates, enabling backlit or reflective illumination of the substrate’s features.

Dependencies are inferred from the claim text.