Semiconductor hydrogen pressure sensor and method for manufacturing same
AssigneeMitsubishi Electric Mobility Corporation
InventorEiji YOSHIKAWA
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Abstract
A semiconductor hydrogen pressure sensor includes: a semiconductor pressure detection element which receives a pressure of a measurement target medium containing hydrogen and electrically outputs a value according to an absolute pressure of the measurement target medium; a bonding wire extending from a terminal of the semiconductor pressure detection element; and a protection film continuously coating parts of the semiconductor pressure detection element and the bonding wire that are exposed to the measurement target medium.
Claims10
A semiconductor hydrogen pressure sensor comprising:
- a semiconductor pressure detection element which receives a pressure of a measurement target medium containing hydrogen and electrically outputs a value according to an absolute pressure of the measurement target medium;
- a bonding wire extending from a terminal of the semiconductor pressure detection element;
- and
- a protection film continuously coating parts of the semiconductor pressure detection element and the bonding wire that are exposed to the measurement target medium.
A method for manufacturing a semiconductor hydrogen pressure sensor, comprising:
- a member preparation step of preparing a bonding wire and a semiconductor pressure detection element which receives a pressure of a measurement target medium and electrically outputs a value according to an absolute pressure of the measurement target medium;
- a connection step of electrically connecting the bonding wire to the semiconductor pressure detection element;
- and
- a film formation step of continuously coating parts of the semiconductor pressure detection element and the bonding wire that are exposed to the measurement target medium, with a protection film.
Dependencies are inferred from the claim text.