N-type silicon block and n-type silicon substrate

Abstract

An n-type silicon block contains a donor including a group 15 element, an acceptor including a group 13 element, carbon, and oxygen. The n-type silicon block includes a first portion including more carbon atoms than oxygen atoms per unit volume. The n-type silicon block includes more atoms of the donor than atoms of the acceptor per unit volume. The donor has a greater segregation coefficient in silicon than the acceptor. An n-type silicon substrate contains a donor including a group 15 element, an acceptor including a group 13 element, carbon, and oxygen. The n-type silicon substrate includes more atoms of the donor than atoms of the acceptor per unit volume, and more carbon atoms than oxygen atoms per unit volume. The donor has a greater segregation coefficient in silicon than the acceptor.

Dependencies are inferred from the claim text.