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US 2026/0092369 A1Published application
Deposition of molybdenum
AssigneeLam Research Corporation
InventorsShruti Vivek Thombare, Naveen Kumar Mahenderkar, Lawrence Schloss, Patrick A. van Cleemput
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Abstract
Provided herein are methods of depositing molybdenum (Mo) films. The methods involve depositing a thin layer of a molybdenum (Mo)-containing film such a molybdenum oxide, a molybdenum nitride, or a molybdenum oxynitride. The Mo-containing film is then converted to an elemental Mo film. A bulk Mo film may then be deposited on the elemental Mo film. In some embodiments, the process is performed at relatively low temperatures.
Claims20
A method comprising:
- depositing a molybdenum (Mo)-containing layer from a first molybdenum-containing precursor and a first co-reactant using a first atomic layer deposition (ALD) process, wherein the first molybdenum-containing precursor is a molybdenum halide or a molybdenum oxyhalide, the first co-reactant is at least one of nitrogen-containing and oxygen-containing, and the Mo-containing layer comprises oxygen and/or nitrogen;
- converting the Mo-containing layer to an elemental Mo layer;
- and
- depositing bulk elemental Mo on the elemental Mo layer from a second molybdenum-containing precursor and hydrogen (H2) using a second ALD process, wherein the second molybdenum-containing precursor is a molybdenum halide or a molybdenum oxyhalide.
1 more element
A method comprising:
- exposing a substrate to multiple atomic layer deposition (ALD) cycles of a first ALD process, each ALD cycle of the first ALD process comprising a dose of a first molybdenum-containing precursor, a dose of a nitrogen-containing and/or oxygen-containing co-reactant, and wherein the first molybdenum-containing precursor and the nitrogen-containing and/or oxygen-containing co-reactant react to form a film containing molybdenum and one or both of nitrogen and oxygen;
- and
- after the first ALD process, exposing the substrate to multiple ALD cycles of a second ALD process, each cycle of the second ALD process comprising a dose of a second molybdenum-containing precursor and a dose of H2 co-reactant, wherein the second molybdenum-containing precursor and H2 co-reactant react to form molybdenum.
Dependencies are inferred from the claim text.