High-Vacuum Micro-Vacuum Cells

A method of manufacturing a micro-vacuum cell comprising at least one vacuum enclosure, the method comprising:

• providing a lid of a first material, the first material having a first coefficient of thermal expansion;
• providing a base of a second material, the second material having a second coefficient of thermal expansion, where the vacuum enclosure is to be formed above a portion of the base;
• forming around said portion of the base a first part of a cold weld compression seal, and forming on a surface of the lid a corresponding second part of said cold weld compression seal;
• baking the lid and the base under vacuum for a predetermined time;
• without breaking the vacuum, letting the lid and the base cool down, then align the first and second parts of the cold weld compression seal and press them together until a predetermined pressure is reached;
• wherein one of the first and second coefficients of thermal expansion is at least five (5) times larger than the other of the first and second coefficients of thermal expansion;
• and
• wherein the pressure in the vacuum enclosure is smaller than an atmosphere.