Plasma generator

Abstract

A discharge may occur in a location in the circumferential direction of a tip portion of an electrode rod, and such a discharge may cause localized consumption of the electrode rod. A plasma generator includes: a nozzle made of metal, the nozzle including a gas passage through which a process gas flows, and an emission port from which the process gas is emitted through the gas passage; and an electrode rod inserted into the gas passage, a voltage being applied between the nozzle and the electrode rod. The plasma generator includes a rotation mechanism that rotates the nozzle about an axis of the electrode rod as a rotating axis. An inner wall surface of the gas passage includes a projection that projects toward the tip portion of the electrode rod.

Dependencies are inferred from the claim text.