Wiring substrate and semiconductor device
AssigneeShinko Electric Industries Co., Ltd.
InventorToyoaki SAKAI
Life of this patent
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AssigneeShinko Electric Industries Co., Ltd.
InventorToyoaki SAKAI
Estimating the term…
A wiring substrate includes a first insulating layer, a first wiring layer formed on the first insulating layer, an N number of insulating layers formed on the first insulating layer and covering the first wiring layer, a cavity formed in the N number of insulating layers and exposing part of the first insulating layer, an electronic component disposed in the cavity and including an electrode covered by the first insulating layer, a filling insulating layer covering the electronic component in the cavity, first via wiring extending through the first insulating layer and connected to the electrode, and a second wiring layer formed on the first insulating layer and electrically connected by the first via wiring to the electrode. The cavity has an opening width that decreases toward the first insulating layer, and the first via wiring has a diameter that decreases toward the electronic component.
A wiring substrate of a coreless type, the wiring substrate comprising:
Dependencies are inferred from the claim text.