Integrated electronic device and corresponding production method
AssigneeValeo Comfort and Driving Assistance
InventorsRaphael Aubry, Mourad Azzaz
Life of this patent
Estimating the term…
Abstract
An integrated electronic device includes at least one component produced on a carrier structure including a semiconductor substrate, and an interconnection track (8) that runs over the carrier structure from the component to a lateral face of the device. The interconnection track includes a layer of oxidizable material bearing a continuous layer of conductive material. The layer of oxidizable material is discontinuous. A method for producing such an integrated electronic device is also disclosed herein.
Claims11
An integrated electronic device comprising:
- at least one component produced on a carrier structure comprising:
- a semiconductor substrate;
- and
- an interconnect track which extends on the carrier structure from the component to a lateral face of the device,
- wherein the interconnect track comprising a layer of oxidizable material supporting a continuous layer of conductive material,
- wherein the layer of oxidizable material is discontinuous.
A method for production of an integrated electronic device comprising at least one component on a carrier structure which comprises a semiconductor substrate, the method comprising:
- producing, on the carrier structure, a blocking structure which has an upper face facing away from the carrier structure;
- producing an interconnect track which extends from the component to a lateral face of the device;
- producing a layer of oxidizable material comprising a first portion which extends on the upper face, and at least a second portion which extends upstream or downstream of the blocking structure along the interconnect track, such that the first portion does not have any continuity of material with the second portion;
- and
- producing a continuous layer of conductive material on the layer of oxidizable material.
Dependencies are inferred from the claim text.