Adsorption substrate

Abstract

An adsorption substrate according to the present disclosure includes a base, an adsorption conductive layer, a lead-out section, and a recessed section. The base has a first surface configured to hold an article to be processed, and a second surface located on an opposite side to the first surface. The base is composed of an insulator. The adsorption conductive layer is located inside the base and extends along the first surface. The lead-out section leads out from the adsorption conductive layer to the second surface. The recessed section is located on the second surface. The lead-out section is exposed at the bottom surface of the recessed section. The adsorption conductive layer includes a through section, through which the insulator penetrates, provided in at least one of the inside of the recessed section or the periphery of the recessed section in plane perspective.

Dependencies are inferred from the claim text.