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AssigneeKokusai Electric Corporation
InventorsAkinari HAYASHI, Shigenori TEZUKA, Jin SHIBATA, Toshiharu KUROSAWA
Estimating the term…
There is provided a technique that includes: a plurality of light emitters arranged to be capable of emitting reference light onto each of a plurality of substrates arranged at a predetermined interval; a plurality of light receivers disposed to face the plurality of light emitters, each of the plurality of light receivers being capable of detecting light transmitted through a corresponding substrate among the plurality of substrates; a driver configured to relatively move the plurality of substrates so that the plurality of substrates pass through a plurality of optical axes connecting the plurality of light emitters and the corresponding plurality of light receivers respectively; a determiner configured to perform a predetermined determination based on a light reception intensity of each of the plurality of light receivers; and a discriminator configured to discriminate a material of each of the plurality of substrates based on a determination result from the determiner.
A mapping apparatus comprising:
A mapping method comprising:
A non-transitory computer-readable recording medium storing a program that causes, by a computer, a substrate processing apparatus to perform a process comprising:
Dependencies are inferred from the claim text.