Micro device mass transfer equipment

A micro device mass transfer equipment, comprising:

• a plurality of transfer stations, each comprising:
• a first base stage;
• a substrate stage, movably disposed on the first base stage and adapted to move close to or away from the first base stage along a movement axis;
• and
• a laser device, movably disposed on the first base stage, wherein the laser device is adapted to move relative to the substrate stage and emits a laser beam toward the substrate stage;
• a plurality of thermal bonding stations, each comprising:
• a second base stage;
• and
• a rolling and pressing mechanism, disposed on the second base stage;
• a plurality of moving stages, respectively adapted to carry a plurality of target substrates, wherein each of the plurality of moving stages is adapted to move to a predetermined position on one of the first base stages of the plurality of transfer stations and the second base stages of the plurality of thermal bonding stations along a moving path, such that the substrate stage or the rolling and pressing mechanism overlaps the each of the plurality of moving stages along an axial direction of the movement axis, the substrate stage is adapted to move between different positions overlapping one of the plurality of moving stages, and the rolling and pressing mechanism forms a contact region with another one of the plurality of moving stages;
• a servomotor module, configured to drive the plurality of moving stages, the substrate stages of the plurality of transfer stations and the laser devices of the plurality of transfer stations to move along their respective movement axes.