Lateral programmable metallization cell devices
AssigneeArizona Board of Regents on behalf of Arizona State University
InventorsMichael KOZICKI, Ninad CHAMELE, Mehmet BALABAN
Life of this patent
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Abstract
Lateral programmable metallization cells may comprise a solid electrolyte layer, an anode coupled to the solid electrolyte layer, and a cathode coupled to the solid electrolyte layer. Exemplary solid electrolyte layers may comprise a first layer comprising an oxide electrolyte and a copper species and a second layer comprising at least one copper species, the second layer coupled to the first layer.
Claims13
1-8. (canceled)
A method for making a lateral programmable metallization cell, the method comprising:
- depositing a copper layer onto an oxide electrolyte layer;
- heating the copper and oxide electrolyte layers in an oxidizing environment to form a solid electrolyte comprising:
- a first layer comprising an oxide electrolyte and a copper species;
- and
- a second layer comprising at least one copper species;
- depositing a cathode onto the solid electrolyte;
- and
- depositing an anode onto the solid electrolyte.
A method for producing a lateral programmable metallization cell, the method comprising:
- depositing a dielectric layer onto a silicon wafer;
- depositing an oxide electrolyte layer onto the dielectric layer;
- depositing a copper layer onto the oxide electrolyte layer;
- heating in an oxidizing ambient to drive the copper into the oxide electrolyte layer and form a copper oxide layer;
- depositing a photoresist layer onto the copper layer;
- patterning the photoresist layer to form an electrolyte channel in the copper layer and the oxide layer;
- depositing an anode onto the electrolyte channel;
- and
- depositing a cathode onto the electrolyte channel.
Dependencies are inferred from the claim text.