Multimodal charge based sensing

A multimodal sensor, comprising:

• a first piezoelectric device;
• a second piezoelectric device;
• a photo sensitive element;
• and
• selection circuitry coupled with the first piezoelectric device, the second piezoelectric device, and the photo sensitive element, wherein the selection circuitry is controlled in a first state to connect the piezoelectric devices, and disconnect the photo sensitive element, with a readout circuitry, and wherein the selection circuitry is controlled in a second state to disconnect the piezoelectric devices, and connect the photo sensitive element, with the readout circuitry.

A method, comprising:

• forming a sensor die comprising selection circuitry, wherein the sensor die includes a diaphragm formed by a membrane over a cavity;
• arranging a first piezoelectric device at a center of the diaphragm;
• and
• arranging a second piezoelectric device on a periphery of the diaphragm,
• wherein the selection circuitry is coupled with the first piezoelectric device and the second piezoelectric device to connect one polarity in a first state to indicate a temperature change and to connect an opposite polarity in a second state to indicate a force change, and
• wherein readout circuitry is coupled with the piezoelectric devices to generate an output indicating either the temperature change or the force change.