Semiconductor device and fabricating method thereof

Abstract

A fabricating method of a semiconductor device includes performing a first patterning process to form a first trench in a substrate structure. The substrate structure includes a substrate and a compound semiconductor layer over the substrate. The first patterning process is performed such that the first trench passes through the compound semiconductor layer and exposes the substrate. The fabricating method further includes forming a capacitor structure in the first trench. Forming the capacitor structure includes: forming a first metal layer lining the first trench and in contact with the substrate; forming a first dielectric layer lining the first metal layer and in contact with the first metal layer; and forming a second metal layer lining the first dielectric layer and in contact with the first dielectric layer.

Dependencies are inferred from the claim text.