Inductors having a high quality factor manufactured using deep trench isolation

A method, comprising:

• etching a trench in a substrate, the substrate doped to form a well;
• forming an inductor coil above a surface of the substrate;
• filling the trench with a dielectric;
• and
• placing a conductor within the dielectric, the conductor biased to create a depletion region below the inductor coil.

An inductor made by a process comprising:

• etching a trench in a substrate, the substrate doped to form a well;
• forming an inductor coil above a surface of the substrate;
• filling the trench with a dielectric;
• and
• placing a conductor within the dielectric, the conductor biased to create a depletion region below the inductor coil.