Capacitor and method of manufacturing capacitor

A method of manufacturing a capacitor, the capacitor comprising at least one capacitor element portion, the at least one capacitor element portion comprising a semiconductor substrate having a main surface with one or more recesses, a conductive layer provided for the main surface and the one or more recesses of the semiconductor substrate, a dielectric layer between the conductive layer and the semiconductor substrate, a first electrode electrically connected to the conductive layer, and a second electrode electrically connected to the semiconductor substrate, the method comprising:

• providing, in a processing target substrate including the semiconductor substrate, the conductive layer, and the dielectric layer, one or more openings in the dielectric layer and the conductive layer present in the main surface of the semiconductor substrate;
• providing a conductive material portion on the main surface located within the one or more openings;
• subjecting the conductive layer to dry etching to form a pattern including a connection portion extending from the conductive layer to the one or more openings;
• providing the first electrode electrically connected to the conductive layer and the second electrode electrically connected to the semiconductor substrate;
• and
• cutting the processing target substrate along a cutting position which includes a position where the connection portion is cut in a direction crossing an extending direction of the connection portion, so as to have the connection portion and the conductive material portion electrically disconnected from each other and to manufacture the at least one capacitor element portion.