Semiconductor device and method of manufacturing semiconductor device
AssigneeSK hynix Inc.
InventorsWeon Guk KIM, Jeong Seob OH
Life of this patent
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AssigneeSK hynix Inc.
InventorsWeon Guk KIM, Jeong Seob OH
Estimating the term…
A semiconductor device includes a support structure including first insulating layers alternately stacked with second insulating layers, a gate structure including conductive layers and including a first section positioned at a level corresponding to a level of the support structure and a second section positioned on the support structure, a contact plug extending through the gate structure and connected to a first conductive layer of the conductive layers, and a first support including pillars extending between the first section and the support structure and extending through the second section, and first protrusions protruding from the pillars into the support structure.
A semiconductor device comprising:
A semiconductor device comprising:
Dependencies are inferred from the claim text.