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US 2026/0089946 A1Published application
Semiconductor device
AssigneeSK hynix Inc.
InventorDoo Hoa CHOI
Life of this patent
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Abstract
A semiconductor device includes: a channel array including channel structures arranged in a first direction and a second direction intersecting the first direction; a first contact plug located to correspond to a center region of the channel array and spaced apart from the channel array by a first distance; and a second contact plug located to correspond to an edge region of the channel array and spaced apart from the channel array by a second distance smaller than the first distance.
Claims19
A semiconductor device comprising:
- a channel array including channel structures arranged in a first direction and a second direction intersecting the first direction;
- a first contact plug located inline with a center region of the channel array and spaced apart from the channel array by a first distance;
- and
- a second contact plug located inline with an edge region of the channel array and spaced apart from the channel array by a second distance smaller than the first distance.
1 more element
A semiconductor device comprising:
- a stack;
- channel structures extending through the stack and arranged in a first direction and a second direction intersecting the first direction;
- and
- contact plugs extending through the stack and adjacent to the channel structures in the second direction,
- wherein the stack includes a cell region where the channel structures are located, a contact region where the contact plugs are located, and a buffer region located between the cell region and the contact region, and
- wherein a portion of the buffer region corresponding to a center region of the cell region has a first width in the second direction, and a portion of the buffer region corresponding to a first edge region of the cell region has a second width smaller than the first width in the second direction.
3 more elements
Dependencies are inferred from the claim text.