Bonded assemblies and methods for forming the same using polymer-based hybrid bonding
AssigneeSanDisk Technologies LLC
InventorsMitsuteru MUSHIGA, Akio NISHIDA, Masaaki HIGASHITANI
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AssigneeSanDisk Technologies LLC
InventorsMitsuteru MUSHIGA, Akio NISHIDA, Masaaki HIGASHITANI
Estimating the term…
A bonded assembly includes a first memory die including a first alternating stack of first insulating layers and first electrically conductive layers, first memory stack structures vertically extending through the first alternating stack, first metal interconnect structures embedded within first memory-die inorganic dielectric layers, and first memory-die copper bonding pads embedded within a first polymer dielectric layer, and a second memory die including a second alternating stack of second insulating layers and second electrically conductive layers, second memory stack structures vertically extending through the second alternating stack, second metal interconnect structures embedded within second memory-die inorganic dielectric layers, and second memory-die copper bonding pads embedded within a second polymer dielectric layer.
A semiconductor structure comprising a bonded assembly, wherein the bonded assembly comprises:
A method of forming a bonded assembly, comprising:
Dependencies are inferred from the claim text.