Memory Circuitry And Methods Used In Forming Memory Circuitry
AssigneeMicron Technology, Inc.
InventorsD. M. Ramitha Y. P. Rupasinghe, Frank Speetjens, Christopher J. Gambee
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AssigneeMicron Technology, Inc.
InventorsD. M. Ramitha Y. P. Rupasinghe, Frank Speetjens, Christopher J. Gambee
Estimating the term…
Memory circuitry comprises vertically-alternating insulative tiers and memory-cell tiers. Memory cells in the memory-cell tiers individually comprise a horizontal transistor, a capacitor that is on a capacitor side of the horizontal transistor, and part of a digitline that is on a digitline side of the horizontal transistor. Insulator material extends from horizontally aside the capacitor side of a top gate in a lower memory-cell tier through the insulative tier that is between an upper and a lower memory-cell tiers to horizontally aside the capacitor side of a bottom gate in the upper memory-cell tier. The insulator material in the upper memory-cell tier and in the lower memory-cell tier has a laterally-outer linearly-straight surface in a vertical cross-section that is through and horizontally-elongated along an axis. The laterally-outer linearly-straight surface being one of vertical, angled from vertical away from the capacitor side by no more than 40°, or angled from vertical toward the capacitor side by no more than 30°. Methods are disclosed.
A method used in forming memory circuitry, comprising:
Memory circuitry comprising:
Memory circuitry comprising:
Dependencies are inferred from the claim text.