Microwave antenna, microwave generating apparatus, and heat treatment apparatus

A microwave generating apparatus comprising:

• a microwave power source;
• a waveguide connected to the microwave power source;
• and
• a microwave antenna connected to the waveguide,
• wherein the microwave antenna comprises:
• a ring frame constituting a circular waveguide;
• a first slot which is a space formed through an inner wall surface of the ring frame;
• and
• a second slot which is a space formed through a lower surface of the ring frame,
• wherein the second slot is formed at a tilting angle with respect to a direction perpendicular to the inner wall surface.

A heat treatment apparatus using microwaves, the apparatus comprising:

• a chamber configured to constitute a processing space for a substrate;
• a dielectric window configured to cover a top of the chamber;
• and
• a microwave generating apparatus configured to provide microwaves to the chamber,
• wherein the microwave generating apparatus comprises:
• a microwave power source;
• a waveguide connected to the microwave power source;
• and
• a microwave antenna located on top of the dielectric window and configured to provide microwaves transmitted through the waveguide to the processing space,
• wherein the microwave antenna comprises:
• a ring frame constituting a waveguide for microwaves;
• a first slot which is a space formed through an inner wall surface of the ring frame;
• and
• a second slot which is a space formed through a lower surface of the ring frame,
• wherein the second slot is formed at a tilting angle with respect to a direction perpendicular to the inner wall surface.