Edge rings with insteps and oversized holes for preventing lift pin contact therewith in substrate processing systems

Abstract

An edge ring for a substrate support is provided. The edge ring includes an annular-shaped body and an instep. The annular-shaped body is sized and shaped to surround an upper portion of the substrate support. The annular-shaped body defines a first top surface, a second top surface, a lower surface, a radially inner surface, and a radially outer surface; and an instep. The instep is disposed at an upper radially inner portion of the annular-shaped body and transitions from the first top surface to the second top surface. The annular-shaped body includes a first hole configured for passage of a first lift pin, the first hole being oversized to prevent the annular-shaped body from contacting the first lift pin.

Dependencies are inferred from the claim text.