Semiconductor device
AssigneeKioxia Corporation
InventorAkifumi GAWASE
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AssigneeKioxia Corporation
InventorAkifumi GAWASE
Estimating the term…
A semiconductor device includes a substrate, an oxide semiconductor layer that is spaced from the substrate and contains a first metal element and oxygen (O), a first wiring opposed to the oxide semiconductor layer, a gate insulating film disposed between the oxide semiconductor layer and the first wiring, a first conductive layer that is in contact with the oxide semiconductor layer and contains a second metal element and oxygen (O), a second wiring connected to the first conductive layer, and a first insulating portion in contact with the second wiring. The first insulating portion includes a first region and a second region between the first region and the second wiring. A concentration of the first metal element or the second metal element in the second region is higher than a concentration of the first metal element or the second metal element in the first region.
A semiconductor device comprising:
A semiconductor device comprising:
Dependencies are inferred from the claim text.