Substrate measurement method

A substrate measurement method comprising:

• acquiring a measurement image corresponding to a measurement area on a substrate by a measurement device;
• determining whether a pattern of the measurement area is recognizable based on the measurement image;
• performing an image correction based on a determination that the pattern of the measurement area is not recognizable;
• and
• determining location information of the measurement area based on a reconstructed image acquired by performing the image correction, wherein
• wherein the performing the image correction comprises:
• acquiring a reference image corresponding to the measurement image,
• extracting phase information based on the measurement image,
• extracting amplitude information based on the reference image, and
• generating the reconstructed image based on the phase information and the amplitude information.

A substrate measurement method comprising:

• acquiring a preliminary alignment mark image by capturing an alignment mark on a substrate using an optical microscope;
• determining a measurement location of an electron microscope based on the preliminary alignment mark image;
• acquiring a measurement image for the alignment mark by capturing the alignment mark using the electron microscope based on the determined measurement location of the electron microscope;
• determining whether a pattern of the alignment mark is recognizable based on the measurement image;
• performing an image correction based on a determination that the pattern of the alignment mark is not recognizable;
• and
• determining location information of the alignment mark based on a reconstructed image acquired by performing the image correction,
• wherein the performing the image correction comprises:
• acquiring a reference image corresponding to the measurement image by the electron microscope,
• extracting phase information from frequency domain information of the measurement image,
• extracting amplitude information from frequency domain information of the reference image, and
• generating the reconstructed image based on the phase information and the amplitude information.